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イオントラップを駆動するための高電圧矩形波発生器

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イオントラップを駆動するための高電圧矩形波発生器
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2.1 RF ................................................................................. 5
2.2
.................................................................. 10
2.2.1 &_*.................................... 11
2.3
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2.3.1
Dc/`K;B............................................................. 15
2.3.2 AM 2WJ;B .................................................................... 18
3N
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3.1
@U .................................................................................................. 22
3.2 MOSFET Jh^.[ ........................................... 26
3.2.1 MOSFET Jh^ ................................................... 26
3.2.2 "]P[........................................................................... 28
3.3 h^$A.[ ........................................................................................ 30
3.3.1 fS<b0Ya(>VFJ ... 30
3.3.2 h^$A.[ .................................................................................. 30
3.4 AM 2W.[ ........................................................................................ 32
4N
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4.1
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4.2
5gj 34e1 .................................. 37
E48d5g=!................................................................................... 37
O?R6 ................................................................................................. 39
4.3
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4.3.1
Dc/`K;B............................................................. 40
E48d5g=!................................................................................... 40
E4O?R6 .......................................................................................... 40
4.3.2 AM 2WJ;B .................................................................... 44
E48d5g=!................................................................................... 44
E4O?R6 .......................................................................................... 44
............................................................................................................... 48
X\ .................................................................................................................. 49
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43
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[1] V. W. Paul and H. Steinwedel, Z. Naturforschg, 8a (1953), 448.
[2] L. Ding, M. Sudakov, S. Kumashiro, Int. J. Mass Spectrom, 221 (2002) 117-138.
[3] L. Ding, M. Sudakov, L. F. Brancia, R. Giles, S. Kumashiro, J. Mass Spectrom, 39
(2004) 471-484.
[4] R. E. March and John F. J. Todd, Quadrupole Ion Trap Mass Spectrometry Second
Edition, Wiley Interscience, New York, (1989)
[5] March&Hughes, Quadrupole Storage Mass Spectrometry, Wiley Interscience, New
York, (1989)
[6] # 2 7:2003;
[7] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. ,
Vedel, F.Int. J. Mass Spectrom. Ion Processes, 95 (1989) 119-156
[8] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. ,
Vedel, F.Int. J. Mass Spectrom. Ion Processes, 99 (1990) 109-124
[9] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. ,
Vedel, F.Int. J. Mass Spectrom. Ion Processes, 11 0 (1991) 159-178
[10] "$903(86540( / FM 1
:- 2 &;
*:1979;
[11] !., / %')+ CQ &*:1983;
[12] D. Okumura, K.Kumondai, S. Yamaguchi, M. Toyoda, M. Ishihara, and I.
Katakuse, J. Mass Spectrom. Soc. Jpn, 48 (2000) 357.
50
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