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イオントラップを駆動するための高電圧矩形波発生器
9( @A?1%+0/ <0&67 !=!"!">."253-."#' 84)B$ :;* , 1N ............................................................................................. 3 2N *#+H .................................................. 5 2.1 RF ................................................................................. 5 2.2 .................................................................. 10 2.2.1 &_*.................................... 11 2.3 %i)Z9' .................................................................................... 14 2.3.1 Dc/`K;B............................................................. 15 2.3.2 AM 2WJ;B .................................................................... 18 3N hc/M7CLI- ......................................................................... 22 3.1 @U .................................................................................................. 22 3.2 MOSFET Jh^.[ ........................................... 26 3.2.1 MOSFET Jh^ ................................................... 26 3.2.2 "]P[........................................................................... 28 3.3 h^$A.[ ........................................................................................ 30 3.3.1 fS<b0Ya(>VFJ ... 30 3.3.2 h^$A.[ .................................................................................. 30 3.4 AM 2W.[ ........................................................................................ 32 4N 5g .................................................................................................. 35 4.1 5gTQ ........................................................................................... 35 4.2 5gj 34e1 .................................. 37 E48d5g=!................................................................................... 37 O?R6 ................................................................................................. 39 4.3 5gk %i)Z9'...................................................................... 40 4.3.1 Dc/`K;B............................................................. 40 E48d5g=!................................................................................... 40 E4O?R6 .......................................................................................... 40 4.3.2 AM 2WJ;B .................................................................... 44 E48d5g=!................................................................................... 44 E4O?R6 .......................................................................................... 44 ............................................................................................................... 48 X\ .................................................................................................................. 49 ,R:G ........................................................................................................... 50 1 2 1 ,.C8@5<¶,.C+J¬S¯d+F P «¦"(w¡Y¢(·«¦"("¶K¯d+( RF ,.C8@5<!>DB8@5<^)(#¶°¯dY° d+(=;C08@5<^)(#(· RF,.C8@5<1953lV.W.Paul%')[1]·9D:6 AC0¯GH©-C9/?5<¯&u)¶³]¯ c+I¯¬XZ(,.C+xV¶¬S«¦" (· EmQ¥ªb,.C+«¦"( ·gh8@5< (,.C¥ªb¶XZ(³]¯c ]z¯c%eW(· )!RF,.C8@5<¶]z1 MHzm³¯c´1kVmµ n+·³¯cn+u(¶Rx_+(r£ '¶]z+e(a®(·¶¯cxk+e(8 @5<)(,.C¥ªb+eW´¯c±Vµ·*¶X Z(¯cr#n(r£¶]}o),.C +«¦"( (·O¶o¯c+(,.C8@5<¢ 713B,.C8@5<^)([2,3]·o¯c)¶Rx_ +³¯c³]+u ¶n[,.C+«¦" (·Rx_+"¶¯c±VU¶]z+e (¶8@5<)(,.C¥ªb+eW(´]z±Vµ (·"¶q~v ¶s\G$fW}p (· !¶Rx_+T&¶n %R xt+y[¤Mr£¶3,<,.C8@5<¢ eN(#j{ ¶ii²(G|T(·*¶ ³]o¶¯c¬³¨2,54C0%'u( (¶L`r£³¯c´1kVmµ+1 MHzm'§³¨2 3 $#. dL?`iGRSh% !",.&+$'dLOfd;Q@KPN:cPh BX\1YiG_EhjT%!",.&+$'607 MD2[UO ()-/ *.h8AH3g5aC4J b=^3g5aC4J]F ikThcPfd ;Q@KPN:]F ilThZWBX\1Y >eVI<9 i 4 2 .*+9$&;/7,1$&;#}!AcS#g! RF $&;/7,1=l!pRF $&;/7,1HBKe#~ X.*+9$&;/7,1HBKeL^imt \Dwr!)35:<)6;~! 2.1 RF RF $&;/7,1xKeqvy][4]TFd " !^im!~! RF $&;/7,1Q 2.1 j8;(_>?s%; 0'4,1_`Z "$&;" 3 _P"nE }"!N_ z |UO{Uk"E aVu "!O{M_ ! ± r2 z2 m =1 r02 z 02 (2.1) r0 8;(_E[IW z 0 $&;/7,1@Y%;0' 4,1z! r0 z 0 aVCZ o b"! r02 = 2z 02 (2.2) 2 %;0'4,1_ + V0 / 2 8;(_ V0 / 2 R#JG! _a2-;)49hf! 5 U(r,z) = V0 2 (r 2z 2 ) 2r02 (2.3) V0 -,3&'#!(% 2.2 .5 V0 -,3&'# !(% 2.2 .5'# r )$2/ "4 z )$0 " 5 % 2.1 RF 3*+15 % 2.2 RF 6 !(5 _V0 2P^@A<_r L>^A> z L>^A>2 P^@4SG?MQB9_!/',%)5!/ r L > z L>E6K621;` 3_-/#^N /("+%)^N]YH8J _HC VAC 2P^@ RP^@ VDC :7_',%)5*&/$+._D(2.3) V0 VAC cost + VDC UI_ U(r,z) = VAC cost + VDC 2 (r 2z 2 ) 2 2r0 (2.4) `',%)0Z\ m _^V e !/[8LTD r _ z L> d 2 r VAC cost + VDC e r=0 2+ dt m r02 2 d z 2 VAC cost + VDC e z = 0 dt 2 m r02 (2.5) `OUIW` t = 2 8eVDC a z = 2a r = 2 2 mr0 4eVAC q z = 2q r = mr02 2 (2.6) D(2.5)Da[8LTD=FX_ d 2u + (ai 2qi cos 2 )u = 0 (u = r , z ) d 2 7 (2.7) X(2.7) Mathieu ]nXKtuta [5] Mathieu ]nX=qtbX? (2.8) u( ) = A C2n cos(2n + i ) + B C2n sin(2n + i ) = 0 n= n= A B E_`AeC2n ai qi ~[]nXt ai , qi L 2.3 m^pDSTL 2.3 STN'(.8+" <)#!%72K r w]ISTPip r = 0 r = 1 z w]I STPip z = 0 z = 1YN ai , qi Mathieu -73 <(K ai , qi 1 OHX(2.8)\gyBtalt q u (t ) = A0 1 + i cos t cos si = 0 2 si = (2.9) i i2 = ai + (2.10) qi2 2 (2.11) 0+;&49 eff (r,z) = m2 2 2 ( r r + z2 z 2 ) 8e (2.12) @r e v| m #$;zFoX(2.9) zF sZF[ si QZVZF>}xh RF MsZF[ U si dWJf[KdWJf[# ZF{kzF $;v|rcCRv|rcj#$;GdWJf[ ZFL 2.4 RF #$;,7*/@ 107 Ag + #$;,7*/D zF&15:<&6; m#$;,7*/Q z 0 = 8 mm r0 = 8 11.3 mm &'7+: /2 = 1 MHz:VAC = 200 V: VDC = 0 V:: "1 x, y,z 4)$50 100 m/s 3:!# -(2/;:qz = 0.143: az = 0: sz /2 = 50.65 kHz: sr /2 = 25.25 kHz ;9 * 2.3 RF ./8,; * 2.4 RF " 107 Ag + 6% 9 2.2 RF !/(,&*XURJW:H<IW:J YX45W:@H<I@QX7CKI> !/UR Y0XL>IW:J! /(,&*PO'$%.!/(,&*8[2,3]Y '$%.!/(,&*WEFSX9 2.1 M?D RF !/(,& *6Y'$%.!/(,&*X9 2.5 ML>IW: -/#WE /)"+&*WEV42Y X!/(,& *1!/T3X;(2.7) Mathieu BN;A=G;?T3 Y d 2u + ( 0 + 2 n cos2n )u = 0(u = r,z) d 2 n=1 ;(2.13) Hill BN;8Y 9 2.5 '$%.!/(,&*45L>IW:Y 10 (2.13) 2.2.1 (%&0"#2)/'*;"#2j?oAFGO `$,-13$.2 \P:f cp5g(%&0"#2)/ '*;"#2j?oJ(2.13) Hill Q^JMoe nHDlpoN<Q^Je $,-13$.2[6] 86c= P:[VQW cpo)/'*FGO ZP:f`[2] eT[V \o Zp (%&0"#2)/'*;"#2M Hill Q^JaKQ^J oR> t = t 0 o@B]KXmE4CSLR> t = t 0 + T 9bhIUJd p u (t 0 + T ) u (t ) = 0 u& (t 0 + T ) u& (t 0 ) (2.14) = 11 21 12 (2.15) 22 11,12 ,21,22 o7Y_9bhI+! u1 (t 0 ) 0 u 2 (t 0 ) 1 = , = u&1 (t 0 ) 1 u& 2 (t 0 ) 0 (2.16) ko t = t 0 + T 9bhI j?Q^JVoi_Q^J(2.17) eVp u1 (t 0 + T ) u (t ) = 1 0 u&1 (t 0 + T ) u&1 (t 0 ) u 2 (t 0 + T ) = u 2 (t 0 ) u& (t ) u& (t + T ) 2 0 2 0 11 (2.17) 1 n 2 EW<n t = t 0 + nT !"0:diLZM 5o Q nM(2.19)Keo n u (t 0 + nT ) u (t ) = n 0 = Q 1 u& (t 0 + nT ) u& (t 0 ) 0 0 -1 u (t 0 ) Q (2.18) n2 u& (t 0 ) 1 0 1 = Q Q (2.19) 0 2 M(2.18)!"0JK(-&)X8n fcg n74EW<VaM(2.20)M(2.21) ]o 11 21 12 = 2 ( 11 + 22 ) + 1 ( 11 22 12 21 = 1) (2.20) 22 (2.21) 11 + 22 < 2 73U<hb ^P'$%.!"0(-&)JKlG D 2.6 `o VDC n VAC D 2.5 `Keo ai , qi [N\k F ^BYn74Keo 8eVDC az = 2ar = mr 2 2 0 4eV AC q = 2q = r z mr02 2 _O\kF (2.22) ^HAn[N\kFHAm9JKlG ToD 2.7 '$%.!"0(-&)6 107 Ag + j>#*+/1#,0 `o!"0(-&)In z 0 = 8 mmn r0 = 11.3 mm ?@kF n /2 = 1 MHzn VAC = 200 Vn VDC = 0 Vnn!"0(-&)6Q x, y,z VC=iL 100 m/s Sn!"0 2; (-&)HA RKonqz = 0.143n az = 0n sz /2 = 50.65 kHzn sr /2 = 12 25.25 kHz 2.6 2.7 107 Ag + 13 2.3 +,:2703J$&)+,:uw"(vd WyqSoP(IOpKvdWyqI(Wyq [*^%'>+,:*Io+,:2703^pK(l ([7][8][9]l%'2703)+,: &({a u+,:#*Lm( ()"IO pK|[$|[MQR(rx <~ 1./8+,:2703IoX*|$cs$ |[*Nh(AY$|[@z[*}(r x% AM ][10]*|(rxIOpK R(*-4 59;-6:% b%'$-459;-6: !b 4 !(-459;-6:tCHB =rx IOpK|[*1./8+,:2703J` P-459;-6: +,:2703_ z 0 = 8 mmr0 = 11.3 mm $|fy [Wyq /2 450 kHzVAC = 293 VVDC = 0 V 2703?i & x, y,z rV)) 0.1 mm )\ke* 100 m/s n107 Ag 2 79 Br + <F2703)(\T*ja0.1 ms 2703g)) IOpK|[*(qz = 0.377az = 0 z /2 = 80.46 kHz r /2 = 38.77 kHz ())IOpK|[G -459;-6:%' Ag2Br UDEL`*))< IOp K([G IOpK|[(Wyq[*Io+, :2703^pK)(+,:uZ +,:2703_z 0 = 8 mmr0 = 11.3 mm $|fy[ Wyq /2 450 kHzVAC = 293 VVDC = 0 V2703?i& x, y,z rV))0.1 m)\ke*100 m/sn` <F2703 14 C="MFp0.1 s',&(L!!5m8dO7WlB ! " q]Echl_R"\@290296p0.06jkD:p !!5m8dO7! "bq 2.3.1 5m8dO7WlBpieWZKTlB2UlB"gY nA2.8oq;< lB31`! q (2.22) V = Vrec + VS cos pt p Vrec ZKTlBp Vs p p !!gY P 2UlBNHaN9 q A 2.8 ZKTlB2UlB"gYTKq nAG^ieWZKTlBpV^gY 2UlBp VS l B"[qo gY lB?TPp r Q>p z Q>5pSI?TPn sr p sz o 2 40XJ5N!q',&(6#$.f9%)* -/%+."A 2.9 [q(a)p(b)p!!2UlB"gY r Q>p z Q>#$.f9"[q(c)p(d) p r Q>SI?TP 15 *P 'AO5MC %K/E T"$!#+ % r =1K/(c)S*:S"$!#+;,T&= z =1K/(d)S*:T(e)S(f) S z =1?8 2@<*P 'AO5MC + %K/E T"$!# % z =1K/(f)S*:S"$!#+;, T&= z =1K/(e)S*:TS4 2.10 S 2@<'AO5MCS*: %"$!#6;, %INOH>G3E Tr =1(a)Sz =1(b)MC O5 VS = 0.25 VS0.5 V F9 Ag2Br 0()-7&L*P .J;,DT QMC'AO5BR QMC'AO52@<77.54 kHzSO5VS = 0.25 VR 16 960/8' $.,160.93 kHz;8'VS = 0.5 V: & 2.9 1).8'/8'60 ! 107 Ag 2 79 Br + 5#< & 2.10 1).8'$., /8'60 * (+" 4783- 2%<99:60/ 8' $., 77.54 kHz;8' VS = 0.25 V;9b:60/8' $., 160.93 kHz;8' VS = 0.5 V: 17 2.3.2 AM 4a7ZH6O`?d_[ORFL`?AM@X!b> 2.11ce :;`?20Ve (2.23) V = (1+ ma cos pt)Vrec dVrec RFL`?dma dp @XD@XLWG8Ie > 2.11 RFL`? AM @X!LFe b>BU_[ORFL`?dNU AM L9TUd ma @XDec AM @XL=LId r J<d z J<4dKC=LIb sr d sz c 2 3 /PE4Ge &+%'5"#-\8$(),. $*-!> 2.12 Se(a)d(b)d1M`?!]Q r J<d z J<"#-\8!Se(c)d(d) d r J<KC=LI4a AM @X!"#-\8!Se&+%'5"#- r J< \8(c)d4Gd&+%'5H6 8(d)d4G e/J z J<\ e(e)d(f) d r J<KC=LI4 a AM @X!"#-\8!Se&+%'5"#- z J <\8(f)d4Gd&+%'5H6 \8(e)d4G e/J z J< ed> 2.13 d=LI AM @X!d4G"#-&+%'AH6"#-Y^ 18 3/(. ,8 r '(a)7 z '(b)"0)3!5 maVAC 61.5 V - $ Ag2Br # 241%+ 8 5AM "0*6 5"0))& 77.54 kHz73!5 maVAC 61.5 V6 19 U9KB5B> 160.93 kHzWS8.U maVAC V1.5 VV 7 2.12 F;BS8 AM 9K" )+# (!$0 107 Ag 2 79 Br + O3%&*,'+X 7 2.13 F;BS85B> AM 9K/<+#( !$:=1+LQSJ@H6XUUV9KB5B> 77.54 kHzWS8.U maVAC V1.5 VW UbV9KB5B> 160.93 kHzWS8.U maVAC V 1.5 V) RNDF;BS8-CS8PE?AW AM 9KD ?A/T2M=14I %&*,'+G 20 ^ ,5!"%'#&] 0Z4JB] r C3] z C30]H;4JB[ sr ] sz \ 2 . (M>0@^ VN+KY7Y7/: ]AM 8T8TJY 7: ]0@&$ 9A1EX D]A1UWYSGQ6<^ +KY7VNCI]AM 8TLCIG 1/5 O= Y7/2PRF?^ -*)RF?^ 21 3 3.1 ,')4!5-2+0x!5p l35$rV 5 ."1+0rVqxEWT 1 MHz aOurHv1kV aOw`PWrH CDQiyuEW`PWx_XrHqun(+*5$ \RxurHun(+*5$MU yx35$rV 5."1+0rVquEW`PWrHC Dxb>^%5,5&?rSremx( +*5$rH7xEWT7xJr AQiy G 3.1 FkfxrZrH V %5,5& C K@ ?rrg Q hxhsr /4#6 1 1 QV = CV 2 2 2 (3.1) 8yrZ<: Vidt = QV (3.2) 1 1 1 QV QV = QV = CV 2 2 2 2 (3.3) 0 xN FkcYjyxhsr /4#6xSr FkcYjy;FLt=]!5-2+0x 9rVqMod 100 pF x1 kVP-P 1 MHz em[CBI 22 I 50 W kP|{ .2"4^s L 3.1 $3,3%@{S{ Vil,')2!3-1+/{_aed}{M hQ\c`Jzc9Kzc}{MhQ\c`JWqL 3.2 j KtmL 3.3 j KtOC7/+&0/2E<}x(+*3#Kt :vot-13(`RhQ\{M}x?ZKtGBD\Q AM Nr[10]KtXR 7}x(+*3#Kt \Qc`J=H(+*3#E<puAD{ M~VIN GND w;gBDY7(+*3#KtB D hQ\{MUn[:vo-13(aIR 2 >TM 4 >hQ\{MBD F56{Mf]{_}{ MhQ\c`9KzchQ\c`J1 MHz1 kVP-P hQ\c``RhQ\8]{Myb AM N r 23 3.2 Digital Waveform GeneratorWAVE FACTORY 1945NF DC voltage(1)300 V/2.5 A PU300-2.5KENWOOD TMI modulating signalMULTIFUNCTION SYNTHESIZER 1940NF DC voltage(2)HIGH VOLTAGE POWER SUPPLY 415BFLUKE 24 3.3 25 3.2 MOSFET 3.1 Y `]?MSFM\C`RN\C[]Z"&% OIa6A`?MJ 1 MHz TE]\CSFMQO "&%3UD`MOSFET P a 3.2.1 MOSFET > MOSFET^FET1~FET4_ 4'`(1"'/3"^T1`T2_VW 8=;H`VIN GND "&%a(1"'/3" FET :<3)4$3"5`"&%3ZEZ `1 L9cbL 9^FET 4'9_ 3c1 7Pa;H8=`MFQO@ 0 / 10 V SFM`MOSFET^2SK982_ 0 / 30 V KC G` !3,0.3#0-&#*2^2SA965`2SC2235_\N+4"'( 1"'/3":<a B 3.4 MOSFET P "&%3AX 26 W@FK8(&#¦y&w¡j¦ W@FK8#%fy'¦2 Z~j'&§!o 8-=< K3&¡j VIN 1/4 ¡j#§Th MOSFET¤FET1~FET4¥ ¦8-=<K3u ¦Rj¤mAI-KL:M8¡j 450 V¥] bp¦_bpr¤''¦Ciss = 330 pF¦Coss = 90 pF¥2SK1153 *Y§e8-=< FET *QaSY¦FET Nv% &¡b*$&§ C H 8 @ F K 8 ¤ T1 ¦ T2 ¥ ¦ D . F - @ @ J - ; H 5 , ¤ EPCOS B64290K659X830 外径 40 mm,内径 24 mm,高さ 16 mm,AL 値 7000 nH,μ= 4300¥ 1 [ 55 h¦¨[ 18 htY§t KQE I ->K¡ qlx 0.5 mm "*Y§ ¦3.1 #¦5K?K6£\¡}¡*% &¡b¦ThXh¦|&-0K@F=E# ¦W@FK8py`¦1 kVP-P * 1 MHz %d ckf 200 W u¢¡/BH1M'&§i 3.1 #h kf¦+8-=<K3n& FET '&§¦FET &¡b*s &!¦U)%{z R1R6 &§ {z R1R6 ¦50W 2F8 qj{zg¤Vishay RCH50 7GM9¥ *Y§ThY-0K@F=E¦ R1R4 15 ¦R5¦R6 33 "*Y§ i 3.5 Xe FET 4M@L:M8¡j¤VDS1¦VDS2¥¦_b '&w¤VOUT¥*§_b'&w VOUT O%¦P% ^ 40 ns VP&§ ¤VDS1¦VDS2 500kHz10 VP-P¥ ¤VOUT 500kHz250 VP-P¥ i 3.5 e FET 4M@L:M8¡j¤VDS1¦VDS2¥¦_b'&w¤VOUT¥ 27 3.2.2 6o MOSFET #]ws)%,+\R!8dgx! !q<`y@AzF 3.6 b;pim.15)BR!z2 ?U G! {fX 4 ?@AP! {rM.15)Y;pim .15)zwCZCZT[Q[11]lkYn_JV9E>] { ($z/&1%..4%*2($xEPCOS B64290K82X830 外径 40 mm,内径 24 mm,高さ 16 mm,AL 値 8700 nH,μ= 4300y 45 EL >] {Li KQE 3%-5ui KiHO 0.5 mm #>] { F 3.6 ;pim.15) 9Ej= aNZ^\D@Az:6 3.2.1 3.2.2 eB" \R! {j= aNZ^\D@A#Iv>] %'5.1 ,0Sh {ZN#F 3.7 b{c6Wtzc7Wt 100 ns :7 { x100 kHz1 kVP-Py x500 kHz1 kVP-Py 28 1 MHz1kVP-P 3.7 29 3.3 3.3.1 03L?H=E!g§OÚ,¾ÉÇÏÍ + f¥ÇÏ` .Á i½*ÚÆ,+y »! .© +ÛNÚ+ÇÏ´q 03L¼.$À²ÚÀ²+03L ¼.BI:¬N_~+ÖÁÑuÇÏ`Å 03L£ ©+'i½+Û03L?H=E¾ÉÇÏ`.ÁvlÚ03L !R 2L@4G=EÔn_,+&À²,03L e `± _o]~Û,}ÖÁÑuÇÏ`Å µl !$ 03L.Nn_+ nO+Û-ÚÖÁ ÑuÇÏ`Å!Ú03L h+cÌÔs wd ÇÏ`Ľz Õ.Q+ÛY"`În?H=EÔ^Î.ÖÁS 03L k¢{ #® Ôs ª+JFI(*c¡Ì,+mÇÏÔ¿ 03L'¦+2AI5M") ¨+Û ¶ÚZj c ³t.CM6 Ñ *ÚÇÏ`Ľ WP+Û, .ÒÚ%® Ôs V_+Ú%!_ +Ó® Ôs.&+à +ÛTp3.3.2Ë$+×Ì[pÈ(* ® Ôs.&+.©Û 3.3.2 ÐÊ&©® Ôs.×Ì[+&Ú® «¨o _bØVOUT1Ú VOUT2Ù MOSFETØ2SK1317Ù.©:0=<pÈ.]Û Ør 3.3 × Ì[pÙ_b VOUT1 VOUT2 .¯·+(*® Ôs.[+Û MOSFET 8M?!BI:?HL:¸º,Zj(*a,+Û 2SK1317 ]b|Ï z&ÚBI:?HL:! FET ]b0LCM; L:.PÚ:0=<L7Ì .Ì&+&Ú1 \ÝÜ\ØFET 8M ?\Ù. 3Ý1 X©+Û B I : ? H L : ! Ú D 1 H 0 ? ? K 0 ; I 9 / Ø EPCOS B64290K659X830 外径 40 mm,内径 24 mm,高さ 16 mm,AL 値 7000 nH,μ= 4300Ù 1 \ 55 pÚÜ\ 18 pX©Û¹! KQE J 0>LÔ¹ ¹x 0.5 mm ' .X©Û r 3.9 ×Ì[pÈ(*® Ôs.[¤.°Û[% Ñ! 200 ns UP+Û 30 500kHz250VP-P 3.9 31 3.4 AM @<EB2-1"& %) VIN +QMKCF< @N5*AN5LDQ AM 6IRO4 3.3 6I3JP*A N5LD QAM 6IQ4 3.2 AM SW />R (&O$!) FT-82-75 外径 20.95 mm,内径 13.21 mm,高さ 6.35 mm,AL 値 2930 nH μ= 5000P 50 39,CR9H KQE ')NH 8H7= 0.26 mm ,CR 4 3.10 F<@N5*AN5LDQ AM 6I .0@<G R "& %)Q#% O500 kHzQ400 VP-P F<@N5 50 kHzQ6I: 0.1 AM 6I RP O500 kHzQ400 VP-P F<@N5 50 kHzQ20 VP-P ?;@LD R P 4 3.10 F<@N5*AN5LDQ AM 6I .0@<(a)500 kHzQ400 VP-P F<@N5 50 kHzQ20 VP-P ?;@ LD(b) 500 kHzQ400 VP-P F<@N5 50 kHzQ6I: 0.1 AM 6I 32 ! 3.11 3.12 ) FET "# 3.12 ! &MOSFET %$#("#' 33 3.11 34 4 4.1 Ojq·¤T¡ » +-I<D9@¶²n§°Z£)g (+-I<D9@½¶²n§°Z£;58F+-I<D9@´ 46:B)ª»S ¼q·¡¢)k 4.1 ¼RL+I¦~$!»+-I'»¡¢)¦~&¼ +-I»+-I<D9@´ W¯´p)¬»W¯¥}. 6)+-I^& EI b»o¯+-I#%y +-I)+-I<D9 @Wzª FAB Se&¼EI »+-I^´p )®&!4C98K´ d%Q%»'#%+-I^ [w('&¼FAB y'+-IGI7)P +-I<D 9@WrV'&¼[w FAB +-IGI7²+-I2K< #%('&¼ +-I<D9@» j©cWµ)"EI1´ N,I=/C9@ $&»EI1´ W|_ r0 = 8 mm»+-I<D9@Mx$,I=/ C9@¨³ z0 = 11.3 mm &¼,I=/C9@´ Mx+-I rVb{Y!¹v 2 mmº±&¼»EI1´ EI +-I^´p)rV&!¹v 2 mmºbrV'+-I )Xa&! .6rV!¹v 2 mmº±&¼ EI1´ `e&u´l¹Vrec : 100 kHz1 MHz»1kVP-P tº» ¾«¸´lui#%y'&¼ +-I<D9@W<D9@'+-I»,I=/C9@´ ¸l >F6´l¹Pulsr +»Pulser -º)`e&<D9@o{Y'&¼ {Y'+-IA:I4CFE?<[12]¹150 mmº#%]'¶ ²n§°Z£h»§°Z'&¹+-I<D9@Mx$Yi ¨³ 0.53 mº¼Yi¹MCPºY\Uf;58F-4H63K@¹LT364» 1 GS/s»G0H+J5C>I¹ºº#%]sm)%»PC d%ª*¼ 35 4.1 36 4.2 (.5A%'AXe+$k2,/?%'A3=18^_\ s_$ s_h >A)o7@C3G VFR P&A4(<18o7@C3G$ ##2,/?9?0;C/CTR6847 ADVANTESTm34401A HEWLETT PACKARDm s_cG" vyd qZ Vrec wrgM VFR $ 0 V " Vrec UqjZJ$ ~ Xe+$3=18"$z" TGHp!z"X 4.2 uf uf Vrec ZJY_Uqj$]## Uqj VFR ZJ$] 132Xe+3=18R"W$s_ " EDs_!e #" Vrec Uqj VFR J ^_\$i 8eV 4eVAC a z = 2a r = 2 DC2 q z = 2q r = " mr02 2 mr0 3=18R"nLVLNIS$2,/?'+@-* C8!O}a[$Q!z_" s_/%:0<C3$X 4.3 { `lF B %'AtEI %'At B %'AtOZ100 V B x|b%'A3=180<A6CK110-3 Pa B vydqZ VAC = 126 V / 2 = 270kHz950kHz 37 4.3 *&!%#$" Xe+#$ +( /2 = 500 kHz* VAC = 196 V* VDC = 0 V) 4.2 ' 1 38 : 4.4 BeF$!"-/%,#'@Ac=Sir J8hz J8@A>QW r = 0 h z = 0 ]h2 UZ (*.0 +/I@Ac=1YVMFir J8@A>Q W r = 1 ]c=h (*.0 +/VM^hh 29BeP/%,#'jdZK`<\_4L[h/ z J8 f/&)#'J8g3Ch r ?h7 r J8H6 ?h3C;RJ8H6?h3Ca3CPT /Dh/&)#'bNEh3C5OG Xi : 4.4 $!"-/%,#'@Ac= 39 4.3 " ! 4.3.1 % n}¡c!L~¡c,*R¤XrU,¨ v#Y0D45J-.H¥Ag2Br+¦,¨ gq¢ % n}¡c Vrec "_}u¡cP,Ag2Br+,9D7= *,*¨¥\NOz')*¨¦¥b4.6(a)"p¦ Vrec !L~¡c,§Ag2Br+"` *\NOVf-.HR ¤+*¥ r w]¦_}u,w(¢!++s¨ , z w]!&¨ ¥835E.2G41J=50a"Wkd,[)©a"g¨¦ g"5-@6AJ9,b 4.5 !¨ h£xM I FAB -.H¥Xe /4cª2.010-3 Pa§Xe Wª8 kV§t¡xMª5 mA¦ I % n}¡c VAC = 292 V0-P§ / 2 = 450 kHz I -.H"TZ/4¥He¦,;E4:E<iQ b 4.6§4.7 !-.H9D7=S! % Ag 2 Br + "§g"\NOV f-.H,R¤XrU!')-.H9D7="e!rU"y ,¨++§b 4.6 !# r w]"§b 4.7 !# z w]"{l_}u!R¤ *L~¡c,"y,¨(a)#§L~¡c, "§(b)(e)#§++ Ag 2 Br + "\NOVf,¡z"j&" (¢!KrU4>09E*¨ % n}¡c!L~ ¡c,*w|#§*¡cP# 150250 mV m§Ag2Br+ "\NOVf,++K$R¤XrU*¨""R¤_}u &^%§"y#§2.3 2?BFJ2CHo(+y'K *¨ R¤XrU,!§b 4.6 "(b)" m/z = 295§m/z = 297 "'! 40 K6V?"$/aeg^Qb"$/GEFj:34Q B j;SL2Tg=!d[ jK6V?" $/RC;SLb;SLc9"$/ 5J K6 k@il :Pj"$/).(+h_Mf>ae7 N`"$/!6A j6AY\"$/Dj# /*%-(+gOHj6A8WIk1XZ] k < 4.5 @i 2 U?&",'-0) 41 295 m/z =293 4.6 297 299 (&")%* r +# Ag 2 Br + $' &"((a)&"!(b)74.3 kHz,250 mV (c)73.7 kHz,200 mV (d)73.2 kHz,150 mV (e)72.5 kHz,250 mV 42 295 m/z =293 4.7 297 299 (&")%* z +# Ag 2 Br + $' &"((a)&"!(b)152.8 kHz,250 mV (c)151.5 kHz,200 mV (d)150.5 kHz,250mV (e)149.0 kHz,250 mV 43 4.3.2 AM ¦%r§c! AM e,*RªXvU,® z#Y¥0D45J-.H«Ag2Br+¬,® hu¨ ¦%r§c Vrec "_y§cP,Ag2Br+,9D7= *,*®«\NO')*®¬«b4.8(a)"t¬ Vrec !AMe,Ag2Br+"` *\NOVg-.HRª +*« r {]¬_y,{(¨!++w® , z {]!&® «b4.84.9« r {] z {]¬!++"\NOVg-.HRª+.H9D7="f!vU+~g,®835E.2G41J=50a "Wmd,[)¯a"h®¬ h"5-@6AJ9#L§c,£*{\~b 4.5 !® i©|M I FAB -.H «Xe /4c°2.010-3 PaXe W¡°8 kVx§|M°5 mA¬ I ¦%r§c VAC = 292 V / 2 = 450 kHz I -.H"TZ/4«He¬,;E4:E<jQ b 4.84.9 !-.H9D7=S!¦% Ag 2 Br + "h"\NOV g-.H,RªXvU!')-.H9D7="f!vU"} ,®++b 4.6 !# r {]"b 4.7 !# z {]"n_y!Rª * AM e,"},®(a)#AM e, " (b)(e)#++ Ag 2 Br + "\NOVg,¤§"k&"(¨!K vU¤4>09E*®¦%r§c! AM e, *{#e"§cP# 1.52.0 V oAg2Br+"\NOVg, ++K¢$RªXvU*®""Rª_y&^%" }#2.3 2?BFJ2CHs(+}'K*® RªXvU,!b 4.8 "(b)" m/z = 295m/z = 297 "'! vU*h"-.H¤§ -.H"qop )\NO l+*"#*_y"L§c,£!vU*h"- 44 !)@51A;K1A;L/!)+9:, S3QT0?R!)$(#&PH<N2JM=I!),4R,4DF!)6 R )%"'#&O>7R,4.B8S *CEG S 45 295 297 m/z =293 299 4.8 AM #!(%) r *" Ag 2 Br + $& # '(a)# (b)76.8 kHz+2 V (c)76.0 kHz+ 1.5 V (d)75.6 kHz+1.5 V (e)74.9 kHz+2 V 46 295 m/z =293 4.9 AM " 297 299 &$' z (! Ag 2 Br + #% " "(a)" (b)158.5 kHz)1.5 V (c)157.0 kHz)1.5 V (d)155.7 kHz)1.5 V (e)154.2 kHz)1.5 V 47 OZ]w 0(.'*t=uq@YGRXU>oX H _c 8 a yMOSFET Vuj$'&0"?h 100kHzx1 MHzw1 kVP-P \FYGRq@UIy 5?oXuq@YGRXU> 0(.'*zsaNpAfm;Pb ^iwH_c8ay!%)0 @YGRXU>t= 0VwoXuq 0(.'*DErBKw#+,/ 1#-02`[dyw9v<gJ:Q kLMQwn iVYGRq@4Sq@lWMQ AM CeVMQw9v<gJ:[dy 63w5?oXuq@YGRXU>w qT7V[dy 48 0(.'*t= «°*"'&Þd%de'Þp* ß«°)'G*>ÞpkªU¨ ¤L¡ÞÈÏO»¸Ô'a¦©Å%ÞÚi_ÉÂÁ½HÞ y{ ©Å% V&·!hS ÞÛxdp* ߶gp* %Ä ßÆ£s¹L ¡ÞlÝ*'׿©ÅÞÚi_ÉÂÁ½H³Ûxd QÀÞQP* ߶gp* %Ä ßeÕ|±ejtÇ;L¡ÞlÝ*'×,-91602 »¸lݺÞÔ̩ųdQÀÞQP* ß Ö¡=e`ZÞ,-91602Ô'/348:/59d QÀ* ß Þ«°/348:/59¢Á´ Þ=ZÓ¥#*I¢ lÝ*'×dQP* ßàz¡ÜCZ ßkwUØ+Þ ÐrvHÞÚi_ÉÂÁ½HÞ׿'Y¯^V& ³ dQÀÞQP* ßF«°]ND}¬+Þ, -91602Ô'©ÅÞÚi_ÉÂÁ½HÞ«°¡³d QÀ* ß«°mLÊ'¾WM+ÞÚi_É ÂÁ½HÞ a¦©Å³dQÀ* ß«°m LÊ'nB+Þ«°¡dQÀ* ßÈÏO.7:2j¡ÒqTZÞ²fÎZÞ¾q¼;ZÞ@£ ZÞ®ÙZÞu[\ZÞAJZÞdQÀÞQP* ßÒ«°¡ÈÏO.7:2§Þeb?Ã&ÞR jEc#d*j ß%Ä ß#«°¡*Ë' ß~Òj¡¡ÞK lÍ'$ÐѦ#µ¦#(o% Ä 2007 z 2 2 <UX ß 49 [1] V. W. Paul and H. Steinwedel, Z. Naturforschg, 8a (1953), 448. [2] L. Ding, M. Sudakov, S. Kumashiro, Int. J. Mass Spectrom, 221 (2002) 117-138. [3] L. Ding, M. Sudakov, L. F. Brancia, R. Giles, S. Kumashiro, J. Mass Spectrom, 39 (2004) 471-484. [4] R. E. March and John F. J. Todd, Quadrupole Ion Trap Mass Spectrometry Second Edition, Wiley Interscience, New York, (1989) [5] March&Hughes, Quadrupole Storage Mass Spectrometry, Wiley Interscience, New York, (1989) [6] # 2 7:2003; [7] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. , Vedel, F.Int. J. Mass Spectrom. Ion Processes, 95 (1989) 119-156 [8] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. , Vedel, F.Int. J. Mass Spectrom. Ion Processes, 99 (1990) 109-124 [9] March, R. E. , McMahon, A. W. , Londry, F. A. , Alfred, R. L. , Todd, J. F. J. , Vedel, F.Int. J. Mass Spectrom. Ion Processes, 11 0 (1991) 159-178 [10] "$903(86540( / FM 1 :- 2 &; *:1979; [11] !., / %')+ CQ &*:1983; [12] D. Okumura, K.Kumondai, S. Yamaguchi, M. Toyoda, M. Ishihara, and I. Katakuse, J. Mass Spectrom. Soc. Jpn, 48 (2000) 357. 50