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JAEA-Technology-2009

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JAEA-Technology-2009
JAEA-Technology
遠隔操作によるEBSD及びTEM用試験片の
調製技術開発
Development on Preparation Technique of Small-sized Irradiation Test
Specimens by a Remote-handling for EBSD and TEM Observations
田口 剛俊 加藤 佳明 相沢 静男
Taketoshi TAGUCHI,Yoshiaki KATO and Shizuo SOZAWA
大洗研究開発センター
照射試験炉センター
原子炉施設管理部
Department of JMTR Operation
Neutron Irradiation and Testing Reactor Center
Oarai Research and Development Center
日本原子力研究開発機構
July 2009
Japan Atomic Energy Agency
日本原子力研究開発機構
JAEA-Technology
遠隔操作によるEBSD及びTEM用試験片の調製技術開発
JAEA-Technology 2009-029
2009-029
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JAEA-Technology 2009-029
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JAEA-Technology 2009-029
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JAEA-Technology 2009-029
᥇⏝ࡍࡿࡇ࡜࡟ࡼࡾṇ☜࡞఩⨨ࡢษ᩿ࡀྍ⬟࡜࡞ࡗࡓࠋࡲࡓࠊษ᩿ཌࡉ┠ᶆࡣࠊ᭱ᑠ㝈ࡢ኱ࡁࡉ
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─ ─
- 㸰 -
JAEA-Technology 2009-029
㔠ᒓヨᩱ࣍ࣝࢲ࣮ࢆ ࡵ࡚࣡ࢵࢡࢫࢆ⁐࠿ࡋࠊヨᩱࢆྲྀࡾእࡋ࡚࢔ࢭࢺ࡛ࣥ㉸㡢ἼὙίࡍ
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㸦㸯㸧ヨ ᩱ
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7(0 ⏝ヨᩱࡣཌࡳࡀ୙ᆒ୍࡛࠶ࡗࡓࡾࣂࣜ➼ࡀⓎ⏕ࡍࡿ࡜ࠊࡑࡢᚋࡢヨᩱㄪ〇ࡸ 7(0 ほᐹ࡟ᨭ
㞀ࡀ࠶ࡿࡓࡵࠊཌࡳࡀᆒ୍࡛ᴟຊࣂࣜࡀ࡛࡞࠸ษ᩿᪉ἲ࡜ࡋ࡞ࡅࢀࡤ࡞ࡽ࡞࠸ࠋࡑࡇ࡛ࠊ௨ୗ
ࡢసᴗᡭ㡰ࢆ᳨ウࡋࡓࠋ
ձヨᩱࢆ┤᥋ᅛᐃࡋษ᩿ࡍࡿ᪉ἲ
ษ᩿᫬࡟኱ࡁ࡞ࣂࣜࡀⓎ⏕ࡋࠊࡑࡢᚋࡢㄪ〇࡟ᨭ㞀ࡀ࠶ࡿࡇ࡜ࡀ᫂ࡽ࠿࡟࡞ࡗࡓࠋ
ղࣂࣜ㜵Ṇ࢝ࣂ࣮ࢆ⿕ࡏ࡚ᅛᐃࡋษ᩿ࡍࡿ᪉ἲ
ࡘ๭ࡢࢫࢸࣥࣞࢫ⟶ࢆ⿕ࡏࡿࡇ࡜࡟ࡼࡾ኱ࡁ࡞ࣂࣜࡢⓎ⏕ࢆᴟຊᢚ࠼ࡿࡇ࡜ࡀ࡛ࡁࡓࠋ
௨ୖࡢ⤖ᯝ࠿ࡽࠊヨᩱࡢษ᩿࡟ࡣࠕࣂࣜ㜵Ṇ࢝ࣂ࣮ࢆ⿕ࡏ࡚ᅛᐃࡋษ᩿ࡍࡿ᪉ἲࠖࢆ᥇⏝ࡍ
ࡿࡇ࡜࡜ࡋࠊ௨ୗ࡟㛤Ⓨࡋࡓసᴗᡭἲࢆ♧ࡍࠋ
ヨᩱ࡜ྠࡌෆᚄࢆ᭷ࡍࡿ ࡘ๭ࡢࣂࣜ㜵Ṇ࢝ࣂ࣮㸦686 〇㸧ࢆヨᩱ࡟⿕ࡏ࡚ᅛᐃࡍࡿࠋ
᭱ึ࡟ヨ㦂࡟౑⏝ࡋ࡞࠸㒊ศࢆษ᩿ࡋ࡚ᇶ‽㠃࡜ࡍࡿࠋ
ࢲ࢖ࣖࣔࣥࢻษ᩿࣍࢖࣮ࣝࢆࡓࢃࡲࡏ࡞࠸⛬ᗘ࡟㈇Ⲵࢆຍ࠼ࡿࠋ
ษ᩿㛤ጞ᫬ࡣࠊᚎࠎ࡟ࢲ࢖ࣖࣔࣥࢻษ᩿࣍࢖࣮ࣝ࡟᥋ゐࡍࡿࡼ࠺࡟ࡺࡗࡃࡾࢳࣕࢵࢡ㒊ࢆ
࠾ࢁࡍࠋ
ษ᩿⤊஢᫬࡟ࡣࠊࣂࣜࡀⓎ⏕ࡋ࡞࠸ࡼ࠺࡟ࢳࣕࢵࢡ㒊ࢆᾋ࠿ࡋ࡞ࡀࡽࡺࡗࡃࡾษ᩿ࡍࡿࠋ
Ⓨ⏕ࡋࡓࣂࣜࡣࠊࣂࣜྲྀࡾ἞ල࡛㝖ཤࡍࡿࠋ
ୖグᡭ㡰࡛ヨᩱࢆ◊☻ࡋࡓ⤖ᯝࠊⰋዲ࡞ 7(0 ⏝ヨᩱࡀᚓࡽࢀࡓࠋ࡞࠾ࠊࡇࡢ᫬ࡢษ᩿ลᅇ㌿ᩘ
ࡣ USP࡜ࡋࡓࠋᮏ᪉ἲ࡛⏝࠸ࡓࣂࣜ㜵Ṇ࢝ࣂ࣮ࠊࣂࣜྲྀࡾ἞ලࢆ )LJ ཬࡧ )LJ ࡟♧
ࡍࠋ௨ୖࡢ᳨ウࡢ⤖ᯝ㛤Ⓨࡋࡓ 7(0 ⏝ࡢヨᩱㄪ〇࡟㛵ࡍࡿᕤ⛬ࢆ )LJ ࡢ࡟♧ࡍࠋ ─ ─
- 㸱 -
JAEA-Technology 2009-029
㸱㸬࣍ࢵࢺࢭࣝෆヨ㦂
㛤Ⓨࡋࡓヨ㦂∦ㄪ〇᪉ἲࡢ᳨ウࢆᇶ࡟ࠊ↷ᑕ῭ヨ㦂∦࠿ࡽࡢヨᩱㄪ〇ࢆࢥࣥࢡ࣮ࣜࢺ 1R ࢭ
ࣝෆ࡛ᐇ᪋ࡋࡓࠋヨᩱㄪ〇ࡣࠊ࣐ࢫࢱ࣮ࢫ࣮ࣞࣈ࣐ࢽࣉ࣮ࣞࢱࢆ౑⏝ࡋ࡚㐲㝸᧯స࡛⾜࠸ࠊ౑⏝
ࡋࡓ⿦⨨ཬࡧ἞ලࡣࠊヨ㦂∦ㄪ〇᪉ἲࡢ᳨ウ࡛౑⏝ࡋࡓࡶࡢࢆ⏝࠸ࡓࠋ
(%6' ⏝ヨᩱࡢㄪ〇
ヨᩱㄪ〇ᕤ⛬ࢆ )LJ ࡟♧ࡍࠋ㔠┦ヨ㦂ᚋࡢᶞ⬡ᇙ㎸ヨᩱࢆཌࡉ⣙ PP ࡢ㍯ษࡾ≧࡟ษ᩿
ࡋࡓᚋࠊ⢒ษ᩿ࠊ⣽ษ᩿ࠊ◊☻ࠊ㟁ゎ⭉㣗ฎ⌮ࡢ㡰࡛ヨᩱㄪᩚࢆ⾜ࡗࡓࠋᶞ⬡ᇙ㎸ヨᩱ࠿ࡽษ᩿
ࡋࡓヨᩱࡢእほࢆ )LJ ࡟♧ࡍࠋ
㸦㸯㸧ヨᩱ
&7 ヨ㦂∦㸸688 〇PP™PP™PPࠊ㧗㏿୰ᛶᏊ↷ᑕ㔞ࡣ ™QPࠋ&7 ヨ㦂∦
ࡢእほࢆ )LJ ࡟♧ࡍࠋ
㸦㸰㸧ษ ᩿
⢒ษ᩿࡟㛵ࡋ࡚ࡣࠊࡁ⿣ඛ➃㏆ഐ㒊ࡀṧࡾࠊ࠿ࡘ᭱ᑠࡢ኱ࡁࡉ࡜࡞ࡿᵝ࡟ษ᩿఩⨨ࢆỴࡵ࡚ษ
᩿ࡋࡓࠋษ᩿఩⨨ࡣࠊ࣐ࢡࣟほᐹ෗┿ࢆ⏝࠸࡚ࡁ⿣᪉ྥࡸ㛗ࡉࢆ☜ㄆࡋ࡚Ỵᐃࡋࡓࠋษ᩿఩⨨ࢆ
Ỵᐃࡍࡿࡓࡵ࡟౑⏝ࡋࡓ෗┿ࢆ )LJ ࡟♧ࡍࠋ⣽ษ᩿ࡣࠊヨᩱ㠃࡟യࡀ௜࠿࡞࠸ࡼ࠺࡟ࣆࣥࢭ
ࢵࢺ࡛⢭ᐦษ᩿ᶵ࡟ᅛᐃࡋ࡚⾜ࡗࡓࠋࡇࡢ㝿ࠊษ᩿᫬ࡢࣂࣜࡀᇶ‽㠃ഃ㸦◊☻᫬࡟㔠ᒓヨᩱ࣍ࣝ
ࢲ࣮࡟ᅛᐃࡍࡿ㠃ࠋࡇࡇ࡛ࡣࠊ㔠┦㠃ഃࡢ཯ᑐഃࡢ㠃ࠋ㸧࡟ฟ࡞࠸ࡼ࠺࡟ྲྀࡾ௜ࡅࡓࠋษ᩿࡟㝿ࡋ
࡚ࡣࠊヨᩱࡀᑠࡉࡃࡁ⿣ࡀ㐍ᒎࡋࡓ⬤࠸㒊఩ࢆࡶࡘࡓࡵࠊ࠸ࡘ࡛ࡶヨᩱ࠿ࡽษ᩿࣍࢖࣮ࣝࢆ㞳ࡏ
ࡿᵝ࡟ὀどࡋ࡞ࡀࡽᐇ᪋ࡋࡓࠋࡲࡓࠊษ᩿⤊஢᫬ࡢษ᩿࣍࢖࣮ࣝࡢᅇ㌿࡛ヨᩱࡀ㣕ᩓࡋ࡞࠸ࡼ࠺
࡟࣐ࢽࣉ࣮ࣞࢱ࡛ಖᣢࡋ࡞ࡀࡽษ᩿ࡋࡓࠋษ᩿ᚋࡢእほࢆ )LJ ࡟♧ࡍࠋཌࡉㄪ〇ࡢࡓࡵࡢษ
᩿ࡣࠊ཯ᇶ‽㠃㒊ࡢ PP 㒊ศࢆࢳࣕࢵࢡࡋ࡚⾜ࡗࡓࠋཌࡉㄪ〇ᚋࡢእほࢆ )LJ ࡟♧ࡍࠋษ᩿
ᚋࡢヨᩱࡣࠊᇶ‽㠃ࡢ㠃ฟࡋࢆ⾜࡞࠺ࡓࡵ࡟࣐ࢽࣉ࣮ࣞࢱࢺࣥࢢ∎ඛ࡛ࡘࡲࢇ࡛◊☻⣬ୖ࡛◊☻
ࡋࣂࣜྲྀࡾࢆ⾜ࡗࡓࠋࣂࣜྲྀࡾ๓ࡢ≧ែཬࡧ㝖ཤᚋࡢእほࢆ )LJ ཬࡧ )LJ ࡟♧ࡍࠋ
㸦㸱㸧◊ ☻
ษ᩿ࡋࡓヨᩱࡣࠊᶍᨃヨ㦂࡜ྠࡌせ㡿࡛㔠ᒓヨᩱ࣍ࣝࢲ࣮࡟࣡ࢵࢡࢫ࡛ᅛᐃࡋࡓࠋᅛᐃࡣࠊヨ
ᩱ⾲㠃࡟യࡀࡘ࠿࡞࠸ࡼ࠺࡟ഃ㠃ࢆࣆࣥࢭࢵࢺ࡛᦬ࢇ࡛⾜ࡗࡓࠋᅛᐃࡋࡓ≧ែࡢ෗┿ࢆ )LJ
࡟♧ࡍࠋࡇࡢᚋࠊヨᩱࡢ◊☻≧ែࢆ☜ㄆࡋ࡞ࡀࡽࠊ⣙ ศ㛫ࡢ⢒◊☻ࢆᩘᅇ⾜ࡗࡓࠋ௙ୖࡆ◊☻
ࡣࠊࡑࢀࡒࢀࢲ࢖ࣖࣔࣥࢻ࣮࣌ࢫࢺ ȣPࠊȣPࠊȣP ࢆ౑⏝ࡋ࡚⾜ࡗࡓࠋ◊☻⤊஢ᚋࠊ㔠ᒓ㢧ᚤ
㙾࡛യ➼ࡀ࡞࠸ࡇ࡜ࢆ☜ㄆࡋࡓࠋ
─ ─
- 㸲 -
JAEA-Technology 2009-029
㸦㸲㸧㟁ゎ⭉㣗
(%6' ࡣࠊ⤖ᬗ⢏⏺ࢆ᫂☜࡟ᯒฟࡉࡏ࡚ヨ㦂ࢆ⾜࠺ᚲせࡀ࠶ࡿࡇ࡜࠿ࡽࠊ◊☻ࡋࡓヨᩱࡢ㟁ゎ⭉
㣗ࢆ⾜ࡗࡓࠋ౑⏝ࡋࡓ㟁ゎ⭉㣗⿦⨨ࡣࠊ㐲㝸᧯స⏝࡟タィ࣭〇సࡉࢀࡓࡶࡢ࡛࠶ࡾࠊࡇࢀࡲ࡛࡟
ࡶከࡃࡢᐇ⦼ࡀ࠶ࡿ⿦⨨࡛࠶ࡿࠋᮏ⿦⨨࡟ヨᩱࢆྲྀࡾ௜ࡅࡓ≧ែཬࡧ㟁ゎ⭉㣗ᾮ࡟ᾐࡋࡓ≧ែࢆ
)LJ ཬࡧ )LJ ࡟♧ࡍࠋ⭉㣗㟁ὶࡣࠊࡁ⿣㒊ศ௨እࡢሙᡤ࡟Ⅼ᥋ゐࡉࡏ࡚ὶࡋࡓࠋ㟁ゎ
⭉㣗ࡣࠊ㸣ࢩࣗ࢘㓟㸦ᾮ 㸸⣙ ᗘ㸧⁐ᾮ୰࡟࡚ࠊ ᅇ⾜ࡗࡓࠋ㟁ᅽཬࡧ㟁ὶࡣࠊࡑࢀࡒࢀ 9
ཬࡧ $ ࡛ᐇ᪋ࡋࠊ㏻㟁᫬㛫ࡣ ᅇ┠ࡀ ⛊ࠊ ᅇ┠ࡀ ⛊ࠊ ᅇ┠ࡀ ⛊࡛࠶ࡗࡓࠋ㟁ゎ⭉㣗
ᚋࠊ⭉㣗≧ែࡀ (%6' ほᐹ࡟㐺ࡋࡓ≧ែ࡟࡞ࡗ࡚࠸ࡿࡇ࡜ࢆ㔠ᒓ㢧ᚤ㙾࡛☜ㄆࡋࡓࠋ㟁ゎ⭉㣗ᚋࡢ
ほᐹ⤖ᯝࢆ )LJ ࡟♧ࡍࠋヨᩱࡣࠊ࣡ࢵࢡࢫࢆ⁐࠿ࡋ࡚ྲྀࡾእࡋࠊ࢔ࢭࢺࣥཬࡧ⵨␃Ỉ࡛ࡑࢀ
ࡒࢀ⣙ ศ㛫ࡢ㉸㡢ἼὙίࢆ⾜ࡗࡓࠋࡇࡢᚋࠊヨᩱ࡟യ➼ࡀ⏕ࡌ࡚࠸࡞࠸ࡇ࡜ࢆ㧗ಸ⋡ほᐹ⿦⨨
࡟࡚☜ㄆࡋࡓࠋὙίᚋࡢ≧ែࢆ )LJ ཬࡧ )LJ ࡟♧ࡍࠋ
7(0 ⏝ヨᩱࡢㄪ〇
ヨᩱࡣ஦ᴗᡤ࡬ࡢ㍺㏦➼ࢆᐜ᫆࡟ࡍࡿࡇ࡜ࢆ⪃៖ࡋ࡚ษ᩿ཌࡉࢆ PP ࡟タᐃࡋࡓࠋษ᩿⤊
஢ᚋࡢヨᩱࡣࠊ㍺㏦ࡢ㝿ᚲせ࡜ࡉࢀࡿᨺᑕ⬟㔞ࢆṇ☜࡟⟬ฟࡍࡿࡓࡵ㔜㔞➼ࡢ ᐃࢆ⾜ࡗࡓࠋ
㸦㸯㸧ヨᩱ
ᘬᙇヨ㦂∦㸦6657 ヨ㦂⤊஢ᚋ㸧686+3 〇㸦㛗ࡉ㸸PPࠊᖹ⾜㒊እᚄ㸸PP㸧
ࠊ㧗㏿୰ᛶᏊ↷
ᑕ㔞ࡣ ™QPࠋᘬᙇヨ㦂∦6657 ヨ㦂⤊஢ᚋࡢእほࢆ )LJ ࡟♧ࡍࠋ
㸦㸰㸧ษ᩿
6557 ヨ㦂⤊஢ᚋࡢྛヨ㦂∦ࡣࠊ◚᩿఩⨨ࡸ⤠ࡾࡀࡑࢀࡒࢀ␗࡞ࡿࡓࡵࠊᣑ኱෗┿࠿ࡽᖹ⾜㒊ศ
ࢆ☜ㄆࡋ࡚ษ᩿఩⨨ࢆỴᐃࡋࡓࠋษ᩿ࡣࠊᶍᨃヨ㦂࡜ྠࡌ᪉ἲ࡛⾜ࡗࡓࠋษ᩿ᚋࡢእほࢆ )LJ
࡟♧ࡍࠋࡲࡓࠊษ᩿ࡢ㝿࡟⏕ࡌࡓࣂࣜྲྀࡾసᴗࢆ )LJ ♧ࡍࠋ࡞࠾ࠊษ᩿ཌࡉࡣࠊ┠ᶆ್ PP
࡟ᑐࡋ࡚sPP ௨ෆ࡛࠶ࡗࡓࠋ
㸲㸬ࡲ࡜ࡵ
࣍ࢵࢺ࡛ࣛ࣎ࡢ㐲㝸᧯స࡟ࡼࡿ (%6' ཬࡧ 7(0 ヨᩱㄪᩚ࡟㛵ࡍࡿᢏ⾡㛤Ⓨࢆ⾜ࡗࡓࠋ௨ୗ࡟୺
࡞ᡂᯝࢆ♧ࡍࠋ
㸦㸯㸧(%6' ⏝ヨᩱࡢㄪ〇
࣭ヨ㦂∦ࡢཌࡉㄪ〇࡟㛵ࡋ࡚ࡣࠊษ᩿࡜◊☻࡟ࡼࡿ⤌ࡳྜࢃࡏㄪ〇᪉ἲ࡟ࡼࡾཌࡉ PPࡢ
ヨᩱࡢ᥇ྲྀࡀ࡛ࡁࡿᡭἲࢆ㛤Ⓨࡋࡓࠋࡇࢀ࡟ࡼࡾࠊࡇࢀࡲ࡛ᶞ⬡ᇙ㎸ヨᩱ࡛ၥ㢟࡜࡞ࡗ࡚࠸
ࡓヨᩱࡢࢳ࣮ࣕࢪ࢔ࢵࣉࢆ㜵Ṇࡍࡿࡇ࡜ࡀྍ⬟࡜࡞ࡗࡓࠋ
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- 㸳 -
JAEA-Technology 2009-029
࣭ ᚤᑠヨᩱࡢ◊☻࡟ࡘ࠸࡚ࡣࠊ㔠ᒓ〇ヨᩱ࣍ࣝࢲ࣮࡟࣡ࢵࢡࢫ࡛ᅛᐃࡋ࡚⾜࠺᪉ἲ࡟ࡼࡾゎ
Ỵࡋࡓࠋ
࣭㟁ゎ⭉㣗࡟ࡘ࠸࡚ࡣࠊᑠࡉ࠸ヨᩱ࡛ࡶⅬ᥋ゐἲ࡟࡚ฎ⌮࡛ࡁࡓࠋ
㸦㸰㸧7(0 ⏝ヨᩱࡢㄪ〇
࣭ ࡘ๭ࡢࢫࢸࣥࣞࢫ⟶ࡸษ᩿᮲௳ࢆㄪᩚࡋ࡚ࠊࣂࣜࢆᴟຊపῶࡋࡓษ᩿ἲࢆ㛤Ⓨࡋࡓࠋࡇࢀ
࡟ࡼࡾࠊ┠ᶆ್ PP ࡟ᑐࡋ࡚sPP ௨ෆࡢ⢭ᗘ࡛ᆒ୍࡞ཌࡉࡢヨᩱㄪᩚࡀྍ⬟࡜࡞ࡗࡓࠋ
ᮏᢏ⾡㛤Ⓨ࡟ࡼࡾࠊ↷ᑕ῭ࡳヨᩱࢆ⏝࠸ࡓ (%6' ཬࡧ 7(0 ほᐹࡀྍ⬟࡜࡞ࡾࠊ↷ᑕᦆയᶵᵓࡢゎ
᫂࡟ಀࡿ◊✲㛤Ⓨࡢ᥎㐍࡟኱ࡁࡃ㈉⊩ࡍࡿࡇ࡜ࡀ࡛ࡁࡿࠋ
ㅰ ㎡
ሗ࿌᭩ࢆࡲ࡜ࡵࡿ࡟࠶ࡓࡾࠊἙᮧ ᘯ↷ᑕヨ㦂⅔ࢭࣥࢱ࣮㛗ࠊ᪂ぢὈ஧ཎᏊ⅔᪋タ⟶⌮㒊㛗ཬ
ࡧ▼ཎṇ༤↷ᑕヨ㦂⅔๪ࢭࣥࢱ࣮㛗ࠊ▼ሯᝋ⏨↷ᑕヨ㦂㛤Ⓨㄢ㛗㸦↷ᑕヨ㦂⅔ࢭࣥࢱ࣮㸧࠿ࡽࡈ
ຓゝࠊࡈᣦᑟࢆ㡬ࡁࡲࡋࡓࠋࡲࡓࠊヨᩱㄪ〇ࡢᢏ⾡ⓗ࡟㛵ࡍࡿ᝟ሗࢆᨾ୕㍯ᖾኵẶ㸦ཎᏊຊᇶ♏
ᕤᏛ◊✲㒊㛛 ⇞ᩱ࣭ᮦᩱᕤᏛࣘࢽࢵࢺ㸧࠿ࡽ㡬ࡁࡲࡋࡓࠋ௨ୖࢆグࡋ࡚ㅰពࢆ♧ࡋࡲࡍࠋ
ཧ⪃ᩥ⊩
ຍ⸨ె᫂ࠊ୕㍯ᖾኵࠊ㧗⏣ᩥᶞࠊ㏆Ụṇ⏨ࠊ୰ᕝဴஓࠊ͇㔜↷ᑕࡉࢀࡓཎᏊ⅔ᮦᩱࡢࡓࡵࡢ㐲
㝸᧯సᆺ⤖ᬗ᪉఩ゎᯒ⿦⨨ࡢᩚഛ͇ࠊ-$($7HVWLQJࠊ
ࣜࣇ࢓࢖ࣥࢸࢵࢡ♫〇࢝ࢱࣟࢢ
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JAEA-Technology 2009-029
ヨᩱ
)LJ ᶞ⬡࠿ࡽ๤ࡀࢀ࡚኱ࡁ࡞཯ࡾࡀ⏕ࡌࡓヨᩱ
)LJ ഹ࠿࡞཯ࡾࡀほᐹࡉࢀࡓヨᩱ㸦ཌࡉ᪉ྥࡼࡾ㸧
)LJ ヨᩱࢆᣳࡳ㎸ࡴ≉Ṧ἞ල
─ ─
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JAEA-Technology 2009-029
)LJ ࣡ࢵࢡࢫ⁐⼥ࣄ࣮ࢱ࣮
)LJ 㔠ᒓヨᩱ࣍ࣝࢲ࣮
)LJ ヨᩱᅛᐃ⏝࣡ࢵࢡࢫ
⣙ J
─ ─
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JAEA-Technology 2009-029
ษ᩿఩⨨ࡢ࣐࣮࢟ࣥࢢ
EBSD ヨᩱษ᩿
࣡ࢵࢡࢫ࡟࡚ヨᩱᅛᐃ
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㟁ゎ⭉㣗
㔠ᒓヨᩱ࣍ࣝࢲ࣮ࡼࡾヨᩱ⬺㞳࣭Ὑί
እほ᳨ᰝ
㸦㸯㸧(%6' ヨᩱㄪ〇
ษ᩿๓ヨᩱእほほᐹ
㸦7(0 ヨᩱㄪ〇㸧
ࣂࣜ㜵Ṇ࢝ࣂ࣮ྲྀ௜ࡅ
ษ᩿㸦ᖹ⾜㒊㸧3 ⟠ᡤ
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ཌࡉ࣭㔜㔞࣭⥺㔞ᙜ㔞⋡ ᐃ
እほほᐹ
㸦㸰㸧7(0 ヨᩱㄪ〇
)LJ(%6' ཬࡧ 7(0 ⏝ࡢヨᩱㄪ〇࡟㛵ࡍࡿᕤ⛬
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JAEA-Technology 2009-029
ࣂࣜ㜵Ṇ࢝ࣂ࣮
)LJ ࣂࣜ㜵Ṇ࢝ࣂ࣮
)LJ ࣂࣜྲྀࡾ἞ල
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࡚ษ᩿ᚋእほ෗┿㸦ཌࡉ᪉ྥࡼࡾ㸧
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JAEA-Technology 2009-029
JAEA-Technology 2009-029
)LJ ᶞ⬡ᇙ㎸ヨᩱ࠿ࡽษ᩿ࡋࡓヨᩱࡢእほ
)LJ &7 ヨ㦂∦ࡢእほ
─ 12 ─
JAEA-Technology 2009-029
)LJ ษ᩿఩⨨ࢆỴᐃࡍࡿࡓࡵ࡟౑⏝ࡋࡓ෗┿
ࡁ⿣
)LJ ษ᩿ᚋࡢእほ
─ 13 ─
- 㸯㸱 -
JAEA-Technology 2009-029
)LJ ཌࡉㄪ〇ᚋࡢヨᩱእほ
ࣂࣜ
)LJ ษ᩿ㄪ〇ᚋࣂࣜྲྀࡾ๓እほ
─ 14 ─
- 㸯㸲 -
)LJ ษ᩿ㄪ〇ᚋࣂࣜྲྀࡾᚋእほ
JAEA-Technology 2009-029
)LJ ヨᩱࢆ࣡ࢵࢡࢫ࡟࡚ᅛᐃࡋࡓ≧ែࡢ෗┿
)LJ ᘬᙇヨ㦂∦6657 ヨ㦂⤊஢ᚋࡢእほ
)LJ 㟁ゎ⭉㣗⿦⨨࡟ヨᩱࢆྲྀ௜ࡅࡓ≧ែ
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JAEA-Technology 2009-029
)LJ 㟁ゎ⭉㣗ᾮ࡟ᾐࡋࡓ≧ែ
)LJ 㟁ゎ⭉㣗ᚋࡢほᐹ⤖ᯝ
─ 16 ─
JAEA-Technology 2009-029
)LJ Ὑίᚋࡢ≧ែ㸦ヨᩱ㸯㸧
)LJ Ὑίᚋࡢ≧ែ㸦ヨᩱ㸰㸧
─ 17 ─
- 㸯㸵 -
JAEA-Technology 2009-029
)LJᘬᙇヨ㦂∦6657 ヨ㦂⤊஢ᚋࡢእほ
)LJษ᩿ᚋ7(0 ヨᩱࡢእほ
)LJ7(0 ヨ㦂∦ࡢษ᩿ᚋࡢࣂࣜ㝖ཤసᴗ
─ 18 ─
この印刷物は再生紙を使用しています
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