清浄度規格

Fed-Std-209
9920
junge
N d B/d3 0.1
40μ
3
Nd
0.1
/ 2.16
log
5μ
log-2.16logd---
-2.16
d
2.16
----
1
1
0.5μ
0.3μ
10
1μ
0.1μ
/
/
3
-
FED.ST.209 FED.ST.209E
-209
JISB9920
BS5295
VDI2083
NFX44101
KS
QJ2214
1988
1992
1989
1989
1990
1981
1991
1991
0.5
0.5
0.1
0.5
1
0.5
0.3
0.1
0.3
μ
P/ft3
P/
P/
P/
P/
P/
P/
-
-
-
-
-
-
-
-
-
1
-
-
-
M1
0.1μm-5
M1
2
-
0
-
M10
0.1μ -10
1
M1.5
3
C
1
-
M100
10
M2.5
4
D
2
-
M1,000
100
M3.5
5
EorF
3
1,000
M4.5
6
GorH
4
-
10,000
M5.5
7
I
5
40,000 M1,000,000
10,000
100,000
M6.5
8
J
6
400,000 M10,000,000
100,000
-
M7
L
-
-
-
-
P/
0.1μm-1
1
10
4,000 M10,000
-
M100,000
-
100
1,000
-
ISO
ISO
1993
2002
1
5
2002
1
-
art
2
3
1
9
10
10
0.1μm
1
0.1μm
9920
/
4
3
ISO
/
0.1
0.2
0.3
0.5
1
5
-
-
-
-
-
-
ISO
1
10
2
ISO
2
100
24
10
4
ISO
3
1000
237
102
35
8
-
ISO
4
10000
2370
1020
352
83
-
ISO
5
100000
23700
10200
3520
832
29
ISO
6
1000000
237000
102000
35200
8320
293
ISO
7
-
-
-
352000
83200
2930
ISO
8
-
-
-
3520000
832000
29300
ISO
9
-
-
-
8320000
293000
10 ¶ 0.1/
-
2.08
209
209
-
-
-
-
-
-
2
10
3
100
4
1,000
5
10,000
-
-
6
100,000
7
-
-
10
3 ISO3
-
-
-
-
-
100
1000
10000
100000
7 ISO7
-
-
-
8 ISO8
-
-
-
-
-
ISO9
-
-
6.5
-
1
-
6 ISO6
-
-
2 ISO2
5 ISO5
5.5
-
-
4 ISO4
4.5
-
-
-
3.5
-
μm
-
2.5
/
-
1.5
1
14644
1 ISO1
1
-
9920
5
0.1μm
5μm
140,000 0.01μm
0.1μm
0.01μm
140,000
5μm
/
6
80
8.9
9
9
20
20/
¶1,000 L
2
1
7
10
2
9
95
95
2
3
4
5
6
6.3
2.9
2.4
2.1
2
9
1.9